• Wafer Handling System
• Easy to operate
• Wafer size from 100mm up to 300mm
• Models with two, three or four loadports
• Wafer ID reading – back and frontside
• Integrated aligner
• Automatic or manual handling
• Automatic mapping
• Cross or double slots detection
• Customizable receipt
• End effector with nuflon; handling with vacuum or edge contact
• TCP/IP host connection
• Possible options
o Laminar flow
o Ionizer
o Fan filter unit
• Wafer Handling system
• Wafer size 150mm or 200mm (combine both sizes together possible)
• Two loadports
• Automatic or manual handling
• Automatic mapping
• Cross or double slots detection
• Customizable receipt
• End effector with nuflon, handling with vacuum or edge contact
• TCP/IP host connection
• Possible options
o Barcode reader
o RFID reader
SEELANDSTRASSE 3, HS.4 . 23569 LÜBECK . GERMANY
+49 451 70323007 