Manual
Flat Aligner
The universal flat aligner is for 100mm, 5", 150mm and
200mm wafers, and is also available as a low profile model.
The device is easy to operate and can be adapted to various
boat models. The wafers are aligned with the help of a crank
handle. The device's toggle switch allows setting the function.
Low Particle Flat Aligner
The automatic low particle flat aligner is for 150mm and 200mm
wafers. The device is designed with special attention to the
highest clean room requirements as well as particle pollution.
The boat is placed on the boat lift that is lowered automatically
after a short delay. Then the wafer alignment function is
started. After completing the function, the boat lift elevates
the boat so that the wafers are gently placed into the boat
slots.
Manual Notch Aligner
The manual notch aligner for 150mm and 200mm wafers is an
efficient tool for aligning wafer notches and for placing
the wafer notches in the desired position. The device is flat
and easy to operate.
Low Particle Notch Aligner
The automatic low particle notch aligner is available for
150mm, 200mm and for 300mm wafers. After the boat is set up,
the function starts automatically after a short delay. As
a special feature, this device offers separation of the support
rollers. Each wafer position in the boat has an independently
rotating support roller. This prevents previously aligned
wafers from resting on the rotating support roller and rubbing
against the roller. |
