Complex single wafer sorters are available as
floor systems. Models with two, three or
four boat stations are available. Compliant to SEMI standards,
the boats are arranged in a row at the appropriate height
and are therefore easy to operate. The boats are placed on
the stations with the wafers in vertical alignment in the
boat slots. In the model for 150mm wafers, the stations are
equipped with a flat aligner. For Single Wafer Sorters for
200mm wafers, a notch aligner is available, allowing to align
the wafers before reading the wafer ID. For performing the
sorting function, the boats are set upright, placing the wafers
in horizontal alignment. The wafer-ID is read at one station,
and the wafer is placed in the target boat according to the
sorting program.
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