COMET
Vertical wafer transfer systems
are available in versions featuring one to three stations in
automated operation for performing numerous wafer transfer functions
in the semiconductor production. For the fully automated loading
of process systems, wafer transfer systems capable of holding
all boats for the entire lot are available.
Main Features
- Clean room class 1 tested
- Pusher and retainer made of PEEK
- DC motor drive with electronic torque limiter
- Programmable parameters for all movements, processes
and function variations
- Complete sensor technology for error-free operation
- Integrated flat and notch aligners
- ESD equipment
Model versions of the COMET Wafer Transfer Systems
Request more information.
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