GEMINI
The Vertical Wafer Transfer Systems with
one station are designed as a compact desktop system. With
a space requirement of only 205mm x 450mm, this wafer transfer
system can be easily placed anywhere in the production. Thanks
to the short time requirement of only 7 seconds for the wafer
transfer, continuous operation is ensured.
- Clean room class 1 tested
- Pusher and retainer made of ESD-POM
- DC-motor and servomotor drive with electronic torque limiter
- Programmable parameters for all movements, processes
and function variations
- Complete sensor technology for error-free operation
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