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COMET
Monostation
The COMET Monostation System features one
station for transferring 25 or 50 wafers from transport boats
to process boats, made of plastic, quartz, or SiC, among others.
With this system, the operator changes the boat after each work
cycle.
The COMET Monostation Systems are available for the transfer
of 25-25, 25-13/12, 2x 25-50, also for back-to-back, proximity
or in the same slot, and also with solid state sources in the
process boat. Using the integrated sensor technology, the system
detects the boats and wafers, and automatically performs the
work cycle.
If we have not listed your application, we will gladly supply
a special solution for your requirements.
Request more information.
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