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COMET
Inline Systems
The COMET Inline Systems are supplied for
transferring wafers, usually in connection with process systems.
For transfers to long boats in the semi-automated model, the
system comprises two stations. For other applications, these
systems are available with up to 12 stations for transport boats
and one station for the process boat. The COMET Inline Systems
feature extensive functions for automated loading from transport
boats, including the sorting function for test or dummy wafers.
For process systems which require loading the system evenly,
the COMET Inline System features a sorting function that allows
to automatically add missing wafers in a transport boat, and
subsequently removes them after the process is completed.
If we have not listed your application, we will gladly supply
a special solution for your requirements.
Request more information.
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