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COMET
Dual-Station
The COMET Dual-Station features two stations
for the partially automated transfer of 25 or 50 wafers from
transport boats to process boats, made of plastic, quartz, or
SiC, among others. The wafer transfer process of 25-25 wafers
is performed automatically by setting up the transport boat
and the process boat on the COMET Wafer Transfer System. For
the wafer transfer processes of 25-13/12 or 2x 25-50, the operator
changes the boat after several work cycles.
The COMET Dual-Station Systems are available in models for transferring
25-25, 25-13/12, 2x 25-50, also back-to-back, proximity or in
the same slot, and with solid state sources in the process boat.
Using the integrated sensor technology, the system detects the
boats and wafers, and performs the work cycle automatically.
If we have not listed your application, we will gladly supply
a special solution for your requirements.
Request more information.
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