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COMET
3-Stations
These systems feature three stations for
the automated transfer of 25 or 50 wafers from transport boats
to process boats, made of plastic, quartz or SiC, among others.
For the COMET Wafer Transfer Systems with three stations, the
operator places all boats for the transfer onto the system.
Using the integrated sensor technology, the system detects the
boats and wafers, and performs all work cycles automatically.
The COMET wafer transfer systems with three stations are available
in models for transferring 25-25, 25-13/12, 2x 25-50, also back-to-back,
proximity or in the same slot, and with solid state sources
in the process boat. Furthermore, these systems allow to adjust
the distance between the wafers, which leads to advantageous
production results for several diffusion and coating processes.
If we have not listed your application, we will gladly supply
a special solution for your requirements.
Request more information.
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