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PV-R
The non-contact resistivity measurement system
of the model series PV-R has been designed for in-line measurements
on substrates for solar cells, during production of the substrates
and after diffusion. In continuous operation, several sites
on the wafer are measured simultaneously. After evaluation,
this allows determining the distribution of resistivity values
across the surface of the substrates. The non-contact PV-R resistivity
measurement systems feature an extraordinarily high measuring
rate. The systems offer excellent information about the resistivity
distribution without impacting the throughput at the production
line.
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The non-contact resistivity
measurement systems of the PV-R model series are available
in versions with integrated thickness measurement of the
substrates. In addition to directly recording measurement
results as bulk resistivity, these models offer an automatic
correction of the measurement results in relation to the
wafer thickness at the corresponding measurement site.
The model without the non-contact resistivity measurement
can be used for determining the thickness distribution
of the substrates.
Request more information.
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