Non-Contact Resistivity Measurement
This product family includes a number of
different non-contact resistivity measurement systems
for applications in the silicon-based semiconductor production,
the compound semiconductor technology, applications for the
solar cell production as well as production lines for flat panel
displays.
The non-contact resistivity measurement systems all use the
Eddy current principle where the measurement object is entered
into the magnetic field of the coil of a high-frequency circuit.
The design and construction of these systems offer excellent
precision of the measurements. Non-Contact
Resistivity Measurement Systems:
-
M-RES 2000 Wafer
application with manual operation as well as automatic
mapping
- PV-R / PV-RT Inline
PV wafer and PV process metrology
- LCD-R Inline
large panel and web coating process metrology
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