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CD and Overlay Measurement
MicroLine is the name of
an entire product group of optical CD and Overlay measurement
systems. As the basis for recording image data, the manual system
uses a conventional microscope for which the xy stage focus
and the lighting are controlled via the CD and Overlay measurement
system. In the semi-automated and the fully automated versions
of these systems, a solid granite base with integrated vibration
damper serves as the basis for a precision xy stage and as the
bridge for the optical components of the system.
The origins of the complex analysis of gray scales and contrast
go back more than 20 years. On the basis of this experience,
a modern CD and overlay measurement system is available today
with a number of adjustable parameters that allow reliable measurements
of structures of any kind.
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Together with the tested positioning
equipment, the powerful CD and overlay measurement system
offers high throughput for all tasks during production
and development. On different levels, complex measurement
tasks can be solved by using recipes for the automated
production. The recipes are either selected by the operator
using their name, or they can be activated by remote control
using the identification on the wafer or the lot.
Based on the same principle, CD and Overlay measurement
systems are available for large substrates with dimensions
up to 1000mm x 1000mm, where a positioning speed of 800mm/s
is achieved. Substrates with dimensions over 1.500mm are
slanted on a stable frame, and the optical equipment is
positioned at the corresponding measurement site.
Optical measurement systems for precise 3-D measurements
of components, measurements on magnetic heads and ink
jet nozzles as well as for checking optical waveguides
during processing are further products that are highly
regarded around the world because of their excellent precision
and reliability.
Request more information.
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